Model:ST-VUV6
Product info:chip size 6.25 mm2, windowless TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard
Typical applications: 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer
Model:ST-VUV25
Product info:oversized sensing area, chip size 25 mm2, windowless TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard
Typical applications: 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer
Model:ST-EUV6
Product info:chip size 6.25 mm2, windowless TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard
Typical applications: 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer
Model:ST-EUV25
Product info:oversized sensing area, chip size 25 mm2, windowless TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard
Typical applications: 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer