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VUV and EUV Detectors
New generation SiC-based vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) detectors have many advantages over their Si-based counterparts, including low dark current, high quantum efficiency, visible blind, good temperature stability and radiation-hard. They are excellent candidate devices for 193 nm/13.5 nm UV light source monitoring, synchrotron radiation monitoring and calibration, solar wind observation, geoplasma physics study as well as high precision industrial measurement.

Model:ST-VUV6

Product info:chip size 6.25 mm2, windowless TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications: 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model:ST-VUV25

Product info:oversized sensing area, chip size 25 mm2, windowless TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications: 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model:ST-EUV6

Product info:chip size 6.25 mm2, windowless TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications: 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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Model:ST-EUV25

Product info:oversized sensing area, chip size 25 mm2, windowless TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications: 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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